What is RFID Traceability System?
This is Lintec's total system solution of "Adwill" semiconductor-related products, and "Britem" RFID-related products. This controls the wafer manufacturing record by using HF range RFID tag (13.56MHz) that contributes to wafer traceability and on-site work efficiency, in the semiconductor manufacturing process after circuit fabrication through die manufacturing.
- 1.Increases work efficiency and gives thorough quality control through enhanced equipment automation and traceability control in each process
- 2.RFID tag information management reduces the load on the host computer.
- 3.Built-in reader/writer available
RFID Traceability System(Video Clips)
RFID Traceability System for Semiconductor Manufacturing (Back-end Process)
Products for RFID Traceability System
Resin Ring Frame
This resin frame weighs less than half of the conventional metal ring frame, and yet maintains the strength necessary for the use in semiconductor manufacturing (back-end process). It is applicable in different types of semiconductor manufacturing-related equipment (wafer mounter, die bonder*1).
- *1Remodeling may be necessary depending on the equipment model.
- 1.Conforms to SEMI G87-1108
(Safety Frame 300) - 2.Corresponds to RFID traceability system using our RFID tag (optional)*2
- *21.5mm thickness type of Safety Frame 200 is excluded
- 3.Less operator's work and enviromential load by reducing frame weight (with special polyamide plastic)
Base Specifications
| Item | Safety Frame | Metal Frame (SUS) | |||
|---|---|---|---|---|---|
| φ200mm | φ300mm | φ200mm | φ300mm | ||
| Thickness | 1.5mm | 2.0mm | 2.5mm | 1.25mm | 1.5mm |
| Weight | 45g | 60g | 120g | 153g | 300g |
Evaluation Results for Each Process
| Evaluation Item | Safety Frame | Evaluation Condition |
|---|---|---|
| Dicer Compatibility | Yes | Dicer by DISCO Corp. for 300mm wafer |
| Expansion by Die Bonder Compatibility | Yes | Die bonder by Shinkawa Ltd. for 300mm wafer |
| Dicing Tape Lamination Compatibility | Yes | Adwill D·G series, LE Tape |
| Wafer Mounter Compatibility | Yes | Adwill RAD-2500·2700series |
| Ion Elution (Na, Ca, Cl, Br, SO4) | ≦ 1 ppm | 50°C×24 hrs |
Resin Frame Cassette
This resin cassette frame is effective in reducing labor required in the semiconductor manufacturing (back-end process).
- 1.Conforms to SEMI G77-0699
(Safety Cassette 300) - 2.Corresponds to RFID traceability system using our RFID tags (optional)
- 3.Reduction of electrically conductive particles
- 4.Saves operator's work and environmental load by reducing weight
Basic Specifications
| Item | Safety Cassette | Metal Frame Cassette (Aluminum) | ||
|---|---|---|---|---|
| 200mm (25 Levels) |
300mm (13 Levels) |
200mm (25 Levels) |
300mm (13 Levels) |
|
| Cassette Weight | 1.4kg | 3.1kg | 2.5kg | 5.9kg |
| Total Strage Weight | 2.9kg (2.5kg)*3 |
4.7kg | 6.3kg | 9.8kg |
- *3The weight when 1.5mm thickness type of Safety Frame is used.
Ring Frame and Frame Cassette Friction Test Result (Taking in and out 10,000 times)
| Ring Frame | Frame Cassette | Particle | ||
|---|---|---|---|---|
| Quantity *4 | Size | Component *5 | ||
| Safety Frame | Safety Caseette | ≦1mg | Unmeasurable | Resin |
| Metal (SUS) | Metal (Aluminum) | 70mg | 10~30μm (Include Aggregate-substance) |
Fe, Cr, Al |
- *4Quantity are measured by particle weight.
- *5Component Analysis: IR, EDX
- *Safety Frame and Safety Cassette were co-developed with Shin-Etsu Polymer Co., Ltd.
- The Option of RAD Equipment for RFID Traceability System
- ISO 9001 : 2008
Certificate JP08/060975
Lintec Corporation
Agatsuma Plant
Technology Administration/R&D Div. Research Laboratory/Planning Dept.
Business Administration Div. Advanced Materials Operations.
- ISO 9001 : 2008
Certificate JQA-QM7787
Lintec Corporation
Ina Technology Center
- ISO 14001 : 2004
Certificate JP08/070484
Lintec Corporation
(Includes Agatsuma Plant, Ina Technology Center, Research Laboratory, and others)
At Lintec's Research Laboratory (Saitama Prefecture) and Agatsuma Plant (Gunma Prefecture), where tapes for semiconductor manufacturing are developed and manufactured, and at the Ina Technology Center (Saitama Prefecture) where related equipment are developed and manufactured, certification has been obtained for the ISO 9001 quality management system and the ISO 14001 environment management system.
Our exhibit information at SEMICON Japan 2011
