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Advanced Materials Operations [Top Page] > Adwill > Products for Dicing/Mounting Process > UV Irradiation System

1.  Compact, High-Throughput Handles wafers of both 12 inches and 8 inches. More compact with an integrated cassette loader and unloader. Provides high-throughput with two processing lines.     2.  High Quality and High Performance This is a sophisticated system developed by Lintec, the industry-leading supplier of UV curable dicing tapes. Supports the optimization of illuminance and light intensity with high output UV lamp and light intensity checking for each wafer process, and performs UV irradiation in an environment that prevents inhibition by oxygen*. * Conducts UV irradiation in a chamber filled with nitrogen to expel oxygen which inhibits UV curing.     3.  Smooth and Safe Operation A large touch panel improves operability. Ensures safety for operations and maintenance, complying with the SEMI safety guidelines, from design to assembly stages. Supports CE marking     4.  Factory Automation of Assembly Process Realizes factory automation of total assembly process by integrating host communication function and inline system. Host Communication (Communication format: Conforms to SECS I and HSMS/Software: Conforms to GEM) Barcode System Visual Inspection Support System Double loader/unloader A. Work Loading, Scanning, and Unloading A work is automatically detected in the cassette, and then passed to the alignment unit. B. Irradiation Preparation The work is aligned, placed onto the lower pass line of the transfer arm, and then transferred to the UV irradiation starting position. The chamber is filled with nitrogen at this time. C. UV Irradiation The work in the chamber is moved above the UV lamp to be uniformly irradiated. D. Storage Preparation The UV-irradiated work is transferred along the upper pass line of the chamber and transfer arm, and then waits for being unloaded in the upper alignment position. E. Work Storage After the next work is loaded into the chamber, the processed work is stored in the cassette. 1.  Fully-Automatic Improved Process Speed A fully-automatic system with integrated cassette loader and unloader increases operational efficiency.     2.  Controllable Illuminance and Light Intensity Allows control of illuminance and light intensity for effective UV irradiation with high output UV lamp.     3.  Uniform Irradiation of Entire Surface Employs method in which irradiation takes place during movement, achieving uniform irradiation of the entire surface.     4.  Self-diagnosis Function Supports Quality Control This is high performance system incorporates a self-diagnosis function that accurately detects irradiation errors. 1.  High Precision Irradiation with Constant Illuminance Square-wave lighting utilizing a high frequency inverter offers high precision, reliable UV irradiation with optimized illuminance and light intensity.     2.  Automatic Feedback Illuminance Control A built-in sensor enables feedback control to keep constant UV lighting output. By maintaining steady lighting throughout the lamp's life, the system contributes to fabrication of a constant quantity of semiconductors.     3.  Easy Operation with One Press of a Button Improves operability and stability with center loading, while significantly stepping up operational efficiency.     4.  Quick and Uniform Irradiation of Entire Surface Uniform irradiation of the entire surface is assured through mobilization of a nitrogen-filled chamber. Irradiation speed can be freely adjusted in accordance with conditions including wafer size and type.   ISO 9001 : 2000 Certificate JP08/060975 Lintec Corporation   Agatsuma Plant   Technology Administration/R&D Div. Research Laboratory/Planning Dept.   Business Administration Div. Advanced Materials Operations.   ISO 9001 : 2000 Certificate JQA-QM7787 Lintec Corporation   Ina Technology Center   ISO 14001 : 2004 Certificate JQA-EM0750 Lintec Corporation   (Includes Agatsuma Plant, Ina Technology Center, Research Laboratory, and others) At Lintec's Research Laboratory (Saitama Prefecture) and Agatsuma Plant (Gunma Prefecture), where tapes for semiconductor manufacturing are developed and manufactured, and at the Ina Technology Center (Saitama Prefecture) where related equipment are developed and manufactured, certification has been obtained for the ISO 9001 quality management system and the ISO 14001 environment management system.

Adwill products information from SEMICON Japan2009 is available. Back number Virtual Exhibition (2008) Virtual Exhibition (2007)

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