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| This is a chip fabrication process in
which, after the circuit surface has been half-cut, the wafer
is made ultra-thin through back grinding while the chip is diced.
With an in-line system comprised of the Lintec's Fully-Automatic Multifunction Wafer Mounter (RAD-2510 F/12Sa) and Disco Corporation's grinder, the risk
of damage to wafers is reduced and ultra-thin chips (25μm or less)
can be produced with stability. |
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DBG
Surface Protective Tape
This is a wafer surface protective tape that fully prevents infiltration
of grinding fluid during polishing, as well as the generation of chips or
cracks. The tape is laminated by the "RAD-3500
series," BG Tape Laminator. |
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| 1. |
Strong adhesive force fully prevents infiltration
of grinding fluid and chip dust during grinding. |
| 2. |
Absorption and/or relief of compression stress
and shear stress during grinding. |
| 3. |
Suppresses cracking due to contact between
chips. |
| 4. |
Adhesive strength can be freely adjusted through
UV irradiation. |
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| Grinding Stress Model for
Surface Protective Tape |
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DBG Pick-up Tape
A special-purpose pick-up tape for fully transferring chips, diced
after back grinding, from surface protective tape to ring frame.
The tape is mounted with the "RAD-2510
F/12Sa," Fully-Automatic Multifunction Wafer Mounter. |
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| 1. |
Chips diced after back grinding are fully transferred. |
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Stress to chips during pick-up is minimized. |
| 3. |
Cracking due to contact between chips is suppressed |
| 4. |
Ultra-thin, large chips can be picked up securely
by using a special UV curable tape. |
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RAD-2510 F/12Sa (300mm Fully-Automatic Multifunction Wafer Mounter for DBG Process) |
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RAD-3500 series (BG Tape
Laminator) |
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| Area and thickness of chip to
which pick-up tape is applied |
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ISO 9001 : 2000
Certificate JP08/060975
Lintec Corporation
Agatsuma Plant
Technology Administration/R&D Div. Research Laboratory/Planning Dept.
Business Administration Div. Advanced Materials Operations. |
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ISO 9001 : 2000
Certificate JQA-QM7787
Lintec Corporation
Ina Technology Center |
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ISO 14001 : 2004
Certificate JQA-EM0750
Lintec Corporation
(Includes Agatsuma Plant, Ina Technology Center, Research
Laboratory, and others) |
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| At Lintec's Research Laboratory (Saitama Prefecture) and
Agatsuma Plant (Gunma Prefecture), where tapes for semiconductor manufacturing
are developed and manufactured, and at the Ina Technology Center (Saitama
Prefecture) where related equipment are developed and manufactured,
certification has been obtained for the ISO 9001 quality management
system and the ISO 14001 environment management system. |
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