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The Adwill E series of UV curable
back grinding tapes ensure against wafer surface damage during
back grinding and prevent wafer surface contamination caused
by infiltration of grinding fluid and/or debris. Adhesion of
the tapes can be substantially decreased with UV irradiation,
allowing easy removal without placing stress on the wafer.
This feature makes the series suitable for the processing of
large diameter, thin wafers.
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1. |
High device reliability
Since contamination of the wafer surface is extremely minimal,
the wafer does not require cleaning after back grinding. |
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2. |
Maintains a high level of cleanness throughout
the production system
The adhesive coating environment exceeds class 100 (US Federal
Standard 209b). |
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1.
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Tape for preventing wafer bow after back grinding,
and for high-bump wafers
The inherent stress relaxation capability of this tape, curtails
wafer bow that would otherwise arise after back grinding due
to residual stress during tape lamination. Moreover, by dispersing
stress during back grinding of high-bump wafers, this tape prevents wafer damage and wafer dimples,
while enhancing wafer thickness accuracy. |
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| 2. |
Improved wafer thickness accuracy (T.T.V.*)
High precision tape thickness accuracy ensures precision wafer
thickness after back grinding.
* T.T.V.=Total Thickness Variation |
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| 1. |
Fully protects the wafer surface during back
grinding and prevents wafer surface contamination from
infiltration of grinding fluid and/or debris. |
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| 2. |
There is virtually no residual adhesive after
tape is peeled off. |
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| 3. |
For cases in which slight contamination remains
because of wafer surface configuration, the lineup includes
a type that can be removed by cleaning with pure water.
Additionally, there is no danger of contamination from
cleaning fluids because there are no water-soluble ingredients
of light molecular weight in the adhesive. |
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| 4. |
High precision tape thickness accuracy ensures
precision wafer thickness after back grinding. |
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A special-purpose tape for removing back grinding
tape with the Wafer Mounter RAD-2500 series and
the BG Tape Remover RAD-3000 series. |
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| 2. |
This tape, used in combination with each equipment,
allows the removal of back grinding tape without damaging
the wafer. |
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| 3. |
Regardless of the back grinding
tape's material, the peeling tape is securely adhered
by thermo-compression bonding, allowing the complete
removal of the back grinding tape. |
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ISO 9001 : 2000
Certificate JP08/060975
Lintec Corporation
Agatsuma Plant
Technology Administration/R&D Div. Research Laboratory/Planning Dept.
Business Administration Div. Advanced Materials Operations. |
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ISO 9001 : 2000
Certificate JQA-QM7787
Lintec Corporation
Ina Technology Center |
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ISO 14001 : 2004
Certificate JQA-EM0750
Lintec Corporation
(Includes Agatsuma Plant, Ina Technology Center, Research Laboratory,
and others) |
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| At Lintec's Research Laboratory (Saitama Prefecture) and
Agatsuma Plant (Gunma Prefecture), where tapes for semiconductor manufacturing
are developed and manufactured, and at the Ina Technology Center (Saitama
Prefecture) where related equipment are developed and manufactured,
certification has been obtained for the ISO 9001 quality management
system and the ISO 14001 environment management system. |
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